Fabrication of high-T-c superconducting multilayer structure with YBa2Cu3O7-x thin films separated by SrTiO3 interlayers

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dc.contributor.authorUzun, Y.
dc.contributor.authorAvci, I.
dc.date.accessioned2019-10-27T22:13:27Z
dc.date.available2019-10-27T22:13:27Z
dc.date.issued2014
dc.departmentEge Üniversitesien_US
dc.description.abstractMultilayer thin film structures are attractive for superconducting microelectronics, but they are difficult to achieve on high T-c superconductors such as YBa2Cu3O7 - (x) (YBCO) thin films. The conventional process has been based on fabricating the YBCO thin films on multiple buffer layers resulting in a single superconducting upper layer on a multilayer-type structure; here we present a full fabrication process for the growth of a multilayer superconducting thin film structure that contains multiple superconducting YBCO thin film layers separated by SrTiO3 (STO) interlayers in sandwich-type configuration. The deposition process was optimized for dc and rf magnetron sputtering techniques for the deposition of YBCO and STO thin films respectively. An YBCO/STO/YBCO/STO/YBCO type configuration was fabricated on a commercial single crystal (100) STO substrate by precisely tuning the deposition process parameters. Superconducting properties of YBCO layers were tested by ac magnetic susceptibility and resistances versus temperature measurements after the deposition of each additional layer. In order to demonstrate potential device application, a microbridge pattern was fabricated onto the top YBCO layer and current-voltage analysis was performed. (C) 2014 Elsevier B.V. All rights reserved.en_US
dc.description.sponsorshipTUBITAKTurkiye Bilimsel ve Teknolojik Arastirma Kurumu (TUBITAK) [112T075]en_US
dc.description.sponsorshipThis work was supported by the TUBITAK under the project number of 112T075.en_US
dc.identifier.doi10.1016/j.tsf.2014.07.013
dc.identifier.endpage13en_US
dc.identifier.issn0040-6090
dc.identifier.issn0040-6090en_US
dc.identifier.startpage9en_US
dc.identifier.urihttps://doi.org/10.1016/j.tsf.2014.07.013
dc.identifier.urihttps://hdl.handle.net/11454/49795
dc.identifier.volume566en_US
dc.identifier.wosWOS:000341057300003en_US
dc.identifier.wosqualityQ2en_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.language.isoenen_US
dc.publisherElsevier Science Saen_US
dc.relation.ispartofThin Solid Filmsen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectYttium barium copper oxideen_US
dc.subjectThin filmsen_US
dc.subjectMultilayer devicesen_US
dc.titleFabrication of high-T-c superconducting multilayer structure with YBa2Cu3O7-x thin films separated by SrTiO3 interlayersen_US
dc.typeArticleen_US

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