Combinatorial approach to morphology studies of epitaxial thin films

Küçük Resim Yok

Tarih

2006

Dergi Başlığı

Dergi ISSN

Cilt Başlığı

Yayıncı

American Institute of Physics Inc.

Erişim Hakkı

info:eu-repo/semantics/closedAccess

Özet

Described is the application of a combinatorial physical vapor deposition (CPVD) method for studying the growth dynamics of epitaxial films. The CPVD method takes advantage of the angle-dependent evaporation rate from a point source to produce thin film libraries whose deposition rate changes continuously for a factor of 50 across a 70-mm long-substrate. The link between the deposition rate and the resulting thin film morphology was made by spatially correlated absorption and atomic force microscopy measurements. It is shown that the growth of tryphenyldiamine derivate on a silica surface proceeds by three-dimensional growth of isolated islands which, at some critical coverage, coalesce to form uniform amorphous film. While the critical coverage of such films depends on the deposition rate in the 0.015-0.4 nms region, the particle size distribution function does not. © 2006 American Institute of Physics.

Açıklama

Anahtar Kelimeler

Kaynak

Applied Physics Letters

WoS Q Değeri

Scopus Q Değeri

Q1

Cilt

88

Sayı

12

Künye