Optical characterization of thin thermal oxide films on copper by ellipsometry
Küçük Resim Yok
Tarih
2002
Yazarlar
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
Springer-Verlag
Erişim Hakkı
info:eu-repo/semantics/closedAccess
Özet
A complete optical characterization in the visible region of thin copper oxide films has been performed by ellipsometry. Copper oxide films of various thicknesses were grown on thick copper films by low temperature thermal oxidation at 125 degreesC in air for different time intervals. The thickness and optical constants of the copper oxide films were determined in the visible region by ellipsometric measurements. It was found that a linear time law is valid for the oxide growth in air at 125 degreesC. The spectral behaviour of the optical constants and the value of the band gap in the oxide films determined by ellipsometry in this study are in agreement with the behaviour of those Of Cu2O, which have been obtained elsewhere through reflectance and transmittance methods. The band gap of copper oxide, determined from the spectral behaviour of the absorption coefficient was about 2 eV, which is the generally accepted value for Cu2O. It was therefore concluded that the oxide composition of the surface film grown on copper is in the form Of Cu2O (cuprous oxide). It was also shown that the reflectance spectra of the copper oxide-copper structures exhibit behaviour expected from a single layer antireflection coating Of Cu2O on Cu.
Açıklama
Anahtar Kelimeler
Kaynak
Applied Physics A-Materials Science & Processing
WoS Q Değeri
Q1
Scopus Q Değeri
Q2
Cilt
75
Sayı
3
